ENGINEERING AND SCIENCE RESEARCH LABS AND EQUIPMENT
Vacuum Sputter Tool
Associate Professor, Mechanical Engineering Department
The Denton Desktop Pro sputter tool provides ceramic and metal thin film deposition on almost any substrate (Si, polymer, organic, glass, ceramic, or metal) and is equipped with one DC power supply and one RF power supply. This equipment is used for research activities and in undergraduate and graduate instructional labs. In addition, the sputtering system builds on device research (e.g., electronic packaging, flexible electronics, photovoltaics). Features of this tool include a protective/barrier layer for environmental sensitive components, top electrodes to test electrical performance of the devices, and patterned structures for nanotechnology.