Variable Pressure SEM

Variable Pressure SEM EVO

  • EVO 50 variable pressure SEM from Zeiss

  • The SEM has SE and BSE detectors for surface morphology/topology as well as compositional contrast imaging

  • EDS and WDS are available for elemental analysis. WDS allows high resolution elemental mapping to very low concentration

  • It has LaB6 electron source, which has stable and long life filament

  • Extended variable pressure option allows pressure up to 760Pa, providing capability to look at beam sensitive and non-conducting samples

  • It is also equipped with Peltier Cold stage that has -50C to +40C temperature range

  • Extended variable pressure option allows pressure up to 760Pa Provides ability to look at beam sensitive and non-conducting samples
  • This SEM is also equipped with Peltier Cold stage with -50C to +40C temperature range.

Reserve the tool

Instrument Manager: Jenny Amey

Backup: In-Tae Bae