Stylus Profiler


Stylus profiler is used to measure step height, feature height and width, etch depth, film thickness and surface roughness. ADL has a Dektak 8 system from Bruker, which can accommodate up to 8-inch diameter and 1-inch thick samples. Its capabilities include:

  • 2D surface profile measurements with single and automated multi line-scans
  • Vertical Scan Range of up to 1 mm
  • Scan length up to 200 mm
  • Better than 1 nm resolution in height
  • Lateral Resolution: up to 1μm or better
  • Programmable stage with x, y, theta positioning
  • Styli Available: 50 nm, 200 nm, 800 nm, 5μm, 12.5μm, 25μm radius

Reserve the tool

Instrument Manager: Anju Sharma