Stylus Profiler
The Dektak-8 Stylus Profiler from Bruker is used to measure step height, feature height and width, etch depth, film thickness and surface roughness.
System Capabilities:
- 2D surface profile measurements with single and automated multi line-scans
- Max Sample Size of 8 in diameter, 1 in thickness
- Vertical Scan Range of up to 1 mm
- Scan length up to 200 mm
- Better than 1 nm resolution in height
- Lateral Resolution up to 1μm or better
- Programmable stage with x, y, theta positioning
- Styli Available: 50 nm, 200 nm, 800 nm, 5μm, 12.5μm, 25μm radius
Optical Profiler
The Wyko NT1100 Optical Profiler from Veeco Instruments (now Bruker) is a non-contact surface metrology technique that measures high-resolution 3D surface topography, film thickness and surface roughness.
System Capabilities:
- Sub-nanometer vertical resolution at all magnifications
- Sub-nanometer roughness to millimeter-high step measurements
- Motorized, programmable stage for stitching images from large areas
- Multiple objective lenses
- Comprehensive Vision® analysis software