The Hitachi SU5000 VP is an ultra-high resolution Field Emission - Scanning Electron Microscope (FE-SEM)
that operates in both high vacuum pressure and variable pressure modes, allowing flexibility
to handle wide range of specimens. Variable pressure technology allows users to image
their samples without need for conducting coatings. This is extremely useful for reducing
the charging of insulating surfaces, such as those of delicate biological and polymer
samples.
System Capabilities:
- ZrO/W Schottky Emission Electron Gun
- Electron Image Resolution:
- 1.2 nm (@ 30 kV, WD = 5 mm, Mag. 180kx)
- 3.0 nm (@1 kV, WD = 3 mm, Mag. 80kx)
- 2.0 nm (@1 kV, WD = 3 mm, Mag. 120kx) with Beam Deceleration
- 5-axis (X,Y, Z, R, and T) Motorized Computer Eucentric Stage
- Accommodates 8" Diameter Specimens (Max. 80mm Height)
- Variable Pressure Range: 10 - 300 Pa
- 200 nA of Beam Current in both HV and VP Modes
Accessories:
- EDS Detector (Oxford)
- WDS Detector (Oxford)