The X-ray Analysis Suite contains systems for performing non-destructive, X-ray-based characterization and analysis, including X-ray Photoelectron Spectroscopy (XPS), X-ray Imaging and CT, and X-ray Diffraction (XRD). These techniques enable macro- and micro-scale structural, compositional, chemical, and crystallographic analysis, and are often used to characterize Li-ion batteries and battery materials, flip chip packages, bonded wafers, PCBs, semiconductor materials, ceramics, polymers, medical devices and structures, and much more.
The suite includes the following instrumentation:
- 2D X-ray Imaging & 3D X-ray CT — Zeiss Xradia 620 Versa
- 2D X-ray Imaging & 3D X-ray CT — Baker Hughes Phoenix Nanome|X
- X-ray Diffraction (XRD) — PANalytical X’Pert Pro MRD
+ Hot Sample Stage - X-ray Diffraction (XRD) — Rigaku XtaLAB mini II
+ Cryo Sample Holder - X-ray Photoelectron Spectroscopy (XPS) — PHI 5000 VersaProbe II
+ Sample Preparation Chamber — PreVac
+ LEED — Scienta Omicron SPECTALEED
+ Kelvin Probe — KP Technology
+ Residual Gas Analyzer — SRS RGA200
