The Electron Microscopy Suite contains multiple advanced Scanning Electron Microscopes (SEM), a Transmission Electron Microscope (TEM), and a dual beam Focused Ion Beam (FIB-SEM) system to enable nano-scale structural, compositional, chemical, and crystallographic analysis. Energy Dispersive Spectroscopy (EDS), Wavelength Dispersive Spectroscopy (WDS), and Electron Energy Loss Spectroscopy (EELS) are available on several systems for elemental analysis and mapping. In addition, two systems have Electron Back Scattered Diffraction (EBSD) detectors for crystal orientation measurement and mapping, and two systems are equipped with a STEM detector.
The suite includes the following instrumentation:
-
SEMs
Ultra-High Resolution FE-SEM — Hitachi Su5000
+ EDS
+ WDSUltra-High Resolution FE-SEM — Zeiss Supra 55 VP
+ EDS — EDAX Genesis
+ EBSDLaB6 Emitter Environmental SEM — Zeiss EVO-50 XVP
+ EDS — Oxford Inca
-
FIB-SEM
Dual-Beam Ga+ Ion FIB-SEM — FEI NanoLab 600
+ EDS — Oxford
+ EBSD -
PFIB-SEM*
Dual-Beam Multi-ion Plasma FIB-SEM — Thermo Fisher Helios 5 Hydra CX
+ EDS — Oxford
+ STEM 3+ Detector
+ Charge Neutralizer
+ Aquilos-like Cryo Stage Module
+ CleanConnect Inert Transfer Module -
TEM
200-kV FE-TEM — JEOL 2100F
+ EDS
+ EELS -
Prep Tools
Carbon Coater — Cressington 208C
Metal Coater — Cressington 208HR