The Electron Microscopy Suite contains several highly advanced Scanning Electron Microscopes (SEM), a Transmission Electron Microscope (TEM), and a dual beam Focused Ion Beam (FIB-SEM) system to enable ultra-high resolution micro- and nano-scale structural, compositional, chemical, and crystallographic analysis. Energy Dispersive Spectroscopy (EDS), Wavelength Dispersive Spectroscopy (WDS), and Electron Energy Loss Spectroscopy (EELS) are available on several systems for elemental analysis and mapping. One of the traditional SEMs and the FIB-SEM are equipped with Electron Back Scattered Diffraction (EBSD) for crystal orientation measurement and mapping. In addition, two systems are equipped with a STEM detector. This suite is supported by an extensive set of sample preparation tools.
The suite includes the following instrumentation:
- Ultra-High Resolution FE-SEM — Hitachi Su5000
+ EDS
+ WDS - Ultra-High Resolution FE-SEM — Zeiss Supra 55 VP
+ EDS — EDAX Genesis
+ EBSD - LaB6 Emitter Environmental SEM — Zeiss EVO-50 XVP
+ EDS — Oxford Inca - Dual Beam FIB-SEM— FEI NanoLab 600
+ EDS — Oxford
+ EBSD - 200-kV FE-TEM — JEOL 2100F
+ EDS
+ EELS - Carbon Coater (SEM Prep) — Cressington 208C
- Metal Coater (SEM Prep) — Cressington 208HR
