Azores 6600 Photolithography Tool
The Flex Tech Alliance funded project to Azores Corporation of Wilmington, Massachusetts to adopt its Model 5200 Panel Printer stepper to handle and process plastic web material was completed and delivered to CAMM in April 2007. This system has a resolution below 4 microns, with an overlay capability below 1 micron, and the unique capability of compensating for non-isotropic distortions of up to ±400ppm. The system is expected to expose over 1100cm2 of area per minute. Although the system platform and material handling is designed to handle webs up to 24" wide, the system was first configured with a vacuum chuck to handle 8" wide webs. The system was recently upgraded with Northfield Automation web handlers.