|
Code |
Total Direct Costs |
Academic Subsidy |
Academic Rate/hr |
External Academic Rate/hr |
Total Direct and F&A Costs |
Member Subsidy |
Member Rate/hr |
External Rate/hr |
|
|
Tool |
|||||||||
|
Clean Room Daily Charge |
CAMM 01-01 |
10.00 |
- |
10.00 |
15.00 |
23.00 |
8.00 |
15.00 |
23.00 |
|
Azores Photolithography Tool |
CAMM 01-02 |
395.00 |
284.00 |
111.00 |
170.00 |
604.00 |
204.00 |
400.00 |
604.00 |
|
Tamarack Scanning Projection |
CAMM 01-03 |
203.00 |
53.00 |
150.00 |
230.00 |
310.00 |
85.00 |
225.00 |
310.00 |
|
GVE Bobst High Vacuum Coater |
CAMM 01-04 |
370.00 |
170.00 |
200.00 |
306.00 |
567.00 |
167.00 |
400.00 |
567.00 |
|
GVE Bobst Day Rates |
$700 half day, $1,400 full day |
$1,000 half day, $2,000 full day |
$1,400 half day/$2,800 full day |
$2,000 half day/$4,000 full day |
|||||
|
CHA High Vacuum Coater |
CAMM 01-05 |
424.00 |
261.00 |
163.00 |
250.00 |
745.00 |
245.00 |
500.00 |
750.00 |
|
CHA Day Rates |
$570 half day, $1,140 full day |
$875 half day, $1,750 full day |
$1,750 half day/$3,500 full day |
$2,750 half day/$5,250 full day |
|||||
|
ECD In Line Defect Inspection Tool |
CAMM 01-06 |
202.00 |
145.00 |
57.00 |
88.00 |
286.00 |
61.00 |
225.00 |
286.00 |
|
KDF In line Sputter Down |
CAMM 01-07 |
133.00 |
58.00 |
75.00 |
115.00 |
203.00 |
53.00 |
150.00 |
204.00 |
|
Kramer Koating Wet Cleaning |
CAMM 01-08 |
67.00 |
17.00 |
50.00 |
77.00 |
104.00 |
29.00 |
75.00 |
104.00 |
|
ME Roll to Roll Plater |
CAMM 01-09 |
91.00 |
16.00 |
75.00 |
115.00 |
140.00 |
40.00 |
100.00 |
140.00 |
|
Hollmuller Siegmund Wet Stripper Developer |
CAMM 01-10 |
105.00 |
30.00 |
75.00 |
115.00 |
160.00 |
35.00 |
125.00 |
160.00 |
|
Xennia Printer |
CAMM 01-11 |
124.00 |
49.00 |
75.00 |
115.00 |
190.00 |
40.00 |
150.00 |
190.00 |
|
Xennia Day Rates |
$700 half day, $1,400 full day |
$1,000 half day, $2,000 full day |
$1,400 half day/$2,800 full day |
$2,000 half day/$4,000 full day |
|||||
|
Zeiss V12 Stereo Microscope |
CAMM 01-12 |
39.11 |
24.11 |
15.00 |
23.00 |
59.84 |
29.84 |
30.00 |
60.00 |
|
Spin Coater (Photoresist) |
CAMM 01-13 |
50.81 |
35.81 |
15.00 |
23.00 |
77.74 |
37.74 |
40.00 |
80.00 |
|
Spin Coater (Develop, Etch and Strip) |
CAMM 01-14 |
71.65 |
51.65 |
20.00 |
31.00 |
109.63 |
59.63 |
50.00 |
110.00 |
